Fluorinated Gas Products
Nitrogen Trifluoride

 

Main usage :

Main usages include fluorine source of high-energy chemical laser gas, etchant and cleaning solvent of the electronics industry (IC) and Solar PV Industry.

Other uses: perfluoro ammonium production, blanketing gas, which can extend the lamp’s life and increase brightness, and oxidizer in mining and rocket technology.

Packaging Specifications:

Packaging: High-pressure seamless carbon steel cylinder.

Specification: 47L GB or DOT cylinder、470L Y cylinder.

Quality Index of Nitrogen Trifluoride:

GB/T 21287-2007 gas for electronic industry   nitrogen trifluoride

 

Item(Volume Fraction)

 Index

 

 Nitrogen Trifluoride (NF3), 102

  ≥

 99.98

 99.99

 99.996

 Carbon Tetrafluoride (CF4), 10-6

 ≤

 100

 50

 20

 Nitrogen (N2), 10-6

 ≤

 10

 10

 5

 Oxygen plus Argon (O2+Ar), 10-6

 ≤

 10

 5

 3

 Carbon Monoxide (CO), 10-6

 ≤

 10

 5

 1

 Carbon Dioxide (CO2), 10-6

 ≤

 10

 5

 0.5

 Nitrous Oxide (N2O),10-6

 ≤

 10

 5

 1

 Sulfur Hexafluoride (SF6), 10-6

 ≤

 10

 5

 2

 Hydrolysable Fluoride (measured by HF) or Total Acidity,10-6

 ≤

 1

 1

 1

 Moisture (H2O),10-6

 ≤

 1

 1

 1

Media Inquiry
tel:028-85965839
Contact Us | Site Map | Legal | Feedback | RSS | FAQs
Liming Research Institute of Chemical Industry all rights reserved. Without written authorization from China
Haohua Chemical (Group) Corporation such content shall not be republished or used in any form
Produced By CMS 网站群内容管理系统 publishdate:2019/09/09 08:25:28