Fluorinated Gas Products
High-purity Sulfur Hexafluoride

 

High-purity Sulfur Hexafluoride means product purity reaches 99.999% (5N).

Quality Index of High-purity Sulfur Hexafluoride:

Inspection Item

 Purity%

 Nitrogen ppmv

  Oxygen ppmv

 Carbon Tetrafluoride ppmv

 Carbon Monoxide ppmv

Carbon Dioxide ppmv 

Acidity ppmv

Moisture ppmv 

 Index Value

 ≥99.999

 ≤3

 ≤3

 ≤0.5

 ≤0.5

 ≤0.5

 ≤0.1

 ≤2

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